About: http://webisa.webdatacommons.org/126965011

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Electrode material, such as TiN, TaN, W, Al, TiSiN, TiAlN, TaSiN, TaAlN, WN, Cu, or other su
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com