| http://www.w3.org/ns/prov#value | - Specifically, in FIGS. 15B through 15D, the result obtained when the main pattern has the mask enhancer structure is shown with a solid line and the result obtained when the main pattern is a shielding pattern is shown with a broken line. [0231] In all the results shown in FIGS. 15B through 15D, the DOF obtained under an illumination condition that S is approximate to 0.58 is the maximum.
|
