About: http://webisa.webdatacommons.org/127205757

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A power level between about 300 watts and about 1000 watts, such as about 650 watts, has been observed to provide sufficient plasma of the processing gases for etching the substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com