About: http://webisa.webdatacommons.org/127253554

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Sputter targets 12, 14 must therefore be made of the material to be deposited on the substrate, such as copper.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com