About: http://webisa.webdatacommons.org/127631220

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 6 and 7 are diagrams showing a polishing apparatus according to the second embodiment of the present invention, wherein FIG. 6 is a plan view, and FIG. 7 is a cross-sectional view taken along line VII???VII of FIG. 6.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com