About: http://webisa.webdatacommons.org/127642761

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a planar shape of said preliminary heating layer when viewed from the one principal surface has at least one first region overlapping said thin film semiconductor layer, and a second region other than said first region, and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com