About: http://webisa.webdatacommons.org/12765253

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 6a and 6 b are a plan view and a perspective view, respectively, of the one embodiment of the inventive MEMS device using a flexure having an integral actuator.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com