About: http://webisa.webdatacommons.org/127765343

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, dry etching processes such as reactive ion etching, sputtering or plasma etching are suitable.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com