PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Etching is a process for removing unwanted material (i.e., partial or complete layers of material) from a surface (e.g., the surface of a semiconductor-based substrate).
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.se