About: http://webisa.webdatacommons.org/128254654

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method according to any one of claims 22, 32, 40, and 49, wherein the liquid is a solution in which the material constituting the thin film is dissolved.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com