About: http://webisa.webdatacommons.org/128448843

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method for manufacturing a device according to claim 24, wherein the first layer is a metal layer and the second layer includes an Si bonding structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com