About: http://webisa.webdatacommons.org/128917390

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	echnology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca