About: http://webisa.webdatacommons.org/129069922

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although the first conductive film 608 and the second conductive film 609 in this embodiment are a TaN film and a W film, respectively, there is no particular limitation thereto.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com