About: http://webisa.webdatacommons.org/129149719

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the insulating films such as the silicon nitride film and the silicon oxide film, but is in contact with the tungsten film 26 c that is made of the same metal as the wiring, thereby permitting electromigration to be reduced.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com