PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • It should be noted that the inter-gate insulating film 7 may have a structure including not only an aluminum oxide such as the alumina film or the like, but also may have a structure of a single layer or a multiple layered film made of a hafnium oxide, silicon oxide, silicon nitride and/or zirconium oxide.
http://www.w3.org/ns/prov#wasQuotedFrom
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