About: http://webisa.webdatacommons.org/129330560

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At this time, the metal such as aluminum or Au is deposited on the surfaces of the piezoelectric elements by vacuum evaporation, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com