About: http://webisa.webdatacommons.org/129388451

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At step 906, the surface of the sacrificial layer 30 is coated with a layer of resilient material 58 using a process such as CVD or PVD, to a uniform thickness of at least about one micron, and preferably about five microns.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es