About: http://webisa.webdatacommons.org/129390977

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	t of the substrate support 104.The one or more sensors 116 may be ultrasonic, laser, inductive, capacitive, or other type of sensor capable of detecting the proximity of the substrate support 104 within the chamber body 102.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com