About: http://webisa.webdatacommons.org/129492653

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A line pattern is usually formed on a surface of the wafer 64 using the insulating film such as silicon oxide (SiO2) film or silicon nitride (Si3N4) film, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com