About: http://webisa.webdatacommons.org/12960681

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Barrier layers such as titanium tungsten, titanium nitride, tantalum nitride, or other materials may exist along a sidewall and bottom portion of the plug regions 84.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com