About: http://webisa.webdatacommons.org/129747449

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic cross sectional view of a partially completed more advanced DRAM storage cell having very closely spaced word lines and FET gate electrodes and depicts the problem of forming the conventional self-aligned contact.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com