About: http://webisa.webdatacommons.org/12978850

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1a is a cross-sectional illustration of a prior art interconnection structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com