About: http://webisa.webdatacommons.org/129857158

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Vibratory force transducers are known that have been fabricated from a body of semiconductor material, such as silicon, using micromachining techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com