About: http://webisa.webdatacommons.org/129868630

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a fragmentary cross sectional view of the deposition of a layer of silicon oxide and a layer of resist material onto the layer of polysilicon;
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr