| http://www.w3.org/ns/prov#value | - V is an applying voltage from the driving voltage applying means 209. g is an inter-electrode distance between the comb-shaped opposite faces 204 a 1 on the movable electrodes 204, and the first fixed electrodes 205 a 1, 205 a 2, the second fixed electrodes 205 b 1, 205 b 2 and the comb-shaped opposite faces 204 d 1.
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