About: http://webisa.webdatacommons.org/13012186

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a planarization process, such as the chemical mechanical polishing (CMP) technique.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com