| http://www.w3.org/ns/prov#value | - Bulk Y2O 3 or Y2O 3 coated parts and ceramics such as SiC, SiN, Si, A1N and the like are preferred over alumina or anodized aluminum parts due to their ability to dissipate charges on the wafer and thus reduce the probability of arcing as indicated by lower RF voltage measurements.
|
