About: http://webisa.webdatacommons.org/130269975

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such an attachment can be performed by depositing a film such as silicon nitride, SiO2 or the like with a thickness preferably larger than half of the gap height between the SiGe bar 7 and the BOX 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com