About: http://webisa.webdatacommons.org/130390086

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 12 is a graph obtained by plotting the etch rate of Al2 O3 film in Ar sputter-etching and plasma treatment using a gas mixture of Ar/NF3, Ar/Cl2 or Ar/BCl3 against power input to plasma.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com