About: http://webisa.webdatacommons.org/130422028

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a flowchart illustrating a high level one methodology for creating CDO dielectric layers with low residual stress, low-k, high hardness/modulus, and improved integration properties.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com