About: http://webisa.webdatacommons.org/130651968

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Finally, the silicon oxide is etched using a gas mixture including a fluorinated hydrocarbon gas and oxygen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com