About: http://webisa.webdatacommons.org/130667834

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 12 illustrates a manufacturing flowchart for micro-devices (e.g., semiconductor chips, such as ICs and LSIs, a liquid crystal panel, a CCD, a thin-film magnetic head and a micromachine).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com