About: http://webisa.webdatacommons.org/130684805

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a fragmentary cross sectional view of a deposition of a layer of silicon nitride onto a substrate;
http://www.w3.org/ns/prov#wasQuotedFrom	google.es