About: http://webisa.webdatacommons.org/13069835

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Wafer W is, for example, a disc-shaped substrate such as a semiconductor (silicon or the like) or an SOI (Silicon Insulator), and a resist is coated on the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es