About: http://webisa.webdatacommons.org/130705472

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Six factors, including linearity, scale factor and offset for both probes are thereby determined simultaneously, without the need for shuffling wafers into and out of the measurement station.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au