About: http://webisa.webdatacommons.org/130764878

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the absorbing layer is a material which exhibits a high etch selectivity with respect to the underlying reflective layer or capping layer, such as a silicon oxynitride or a silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com