About: http://webisa.webdatacommons.org/130999863

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, this invention can be used with KrF, ArF and other excimer lasers, as well as with F2 molecular gas laser.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com