About: http://webisa.webdatacommons.org/131109870

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, the present invention is a system and method for performing alignment of a substrate using alignment marks on the backside of a substrate supported by a movable chuck.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com