About: http://webisa.webdatacommons.org/131204022

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An intermediate layer 106 may generally comprise a substantially rigid material that is both smooth and etchable, such as silicon or other similar material known to those in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au