About: http://webisa.webdatacommons.org/131243365

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, there is a problem that, since the degradation caused through these processes is superimposed on the distribution of thicknesses, the thickness uniformity deteriorates.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es