About: http://webisa.webdatacommons.org/131250187

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another option is to deposit HfO2, TiO2 and Ti layers. (This is an example where y is set equal to 0 in HfuTivOxNy.) The Ti content of the stack can then be independently controlled.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com