About: http://webisa.webdatacommons.org/131281782

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In such a device a micro-bolometer is formed as a micro-bridge in which a layer of e.g. titanium is spaced about 1 to 4 ??m, typically 2.5 ??m, from a substrate surface by thin legs.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es