About: http://webisa.webdatacommons.org/131586668

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 5, wherein said finding employs a film model that uses parameters including thickness and indices of refraction of the layer, but no parameter related to dimensions or profile of the diffracting structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com