About: http://webisa.webdatacommons.org/131783413

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The amorphous semiconductor film 306 is a semiconductor film mainly containing silicon and is formed by plasma CVD using SiH4 as material gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com