About: http://webisa.webdatacommons.org/131816296

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The step of pulse flow drying substantially removes all liquid droplets adhering to surfaces such as wafer edges, carrier edges, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com