| http://www.w3.org/ns/prov#value | - s. [0027]FIGS. 8A to 8E are plan views showing other examples of the structure of a multi-gate TFT. [0028]FIGS. 9A to 9E are cross sectional views of a substrate illustrating a method of manufacturing TFTs according to a third embodiment. [0029]FIGS. 10A and 10B are cross sectional views of a substrate illustrating a method of manufacturing TFTs according to a fourth embodiment.
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