About: http://webisa.webdatacommons.org/131849470

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The PECVD processing reactor chambers, which contain controlled gaseous environments at reduced pressures, are generally constructed of aluminum, although specialty alloys and materials such as quartz have been used at times.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com