About: http://webisa.webdatacommons.org/131904073

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The processing chamber may perform a vacuum, atmospheric or other process on the substrate, including for example physical vapor deposition (PVD), chemical vapor deposition (CVD), etching, metrology, cleaning, polishing, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com