About: http://webisa.webdatacommons.org/131996220

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The apparatus 100 is useful for processing substrates, such as semiconductor wafers and displays, is provided to illustrate the invention; however, it should not be used to limit the scope of the invention or its equivalents.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au