About: http://webisa.webdatacommons.org/13200828

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As an option, the reverse image of the desired metallization pattern may be created by etching a dielectric material layer such as silicon dioxide or silicon nitride, using a photoresist reverse image as a template.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es